- ultrahigh-vacuum chamber
- надвисоковакуумна камера
English-Ukrainian dictionary of microelectronics. 2013.
ultrahigh-vacuum chamber
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Chemical beam epitaxy — (CBE) forms an important class of deposition techniques for semiconductor layer systems, especially III V semiconductor systems. This form of epitaxial growth is performed in an ultrahigh vacuum system. The reactants are in the form of molecular… … Wikipedia
